Implementation of CMOS photodetectors in optoelectronic circuits

We present in this paper several different photodetector structures implemented with a conventional CMOS fabrication process that can be incorporated into optical data links and information processing systems. We investigate several detector structures using the 2-D materials simulation package MEDICI. The detector structure is evaluated by fabrication using an AMI 1.5 /spl mu/m CMOS process available through the MOSIS foundry service. When geometric and other structural differences are accounted for, the results indicate that the simulation adequately predicts photodetector operation under normal operating conditions.