Surface plasmon resonance on VCSEL with metal grating and nano-aperture

Summary form only given. We propose a nano-aperture VCSEL with surface plasmon resonance for efficient optical near-field generation. We calculate the transmission from the nano-aperture in the silver film with a grating. An increase of transmission depending on the periodicity is confirmed. Also, we fabricate a 400 nm square aperture VCSEL with a concentric circle pattern around the aperture. A ripple in the optical near-field due to the surface plasmon resonance is observed at a periodicity of 600 nm.