High sensitivity magnetic near field probe based on ferromagnetic thin-film technology

The high frequency carrier type thin-film magnetic field sensor was applied to detect magnetic field over the microstrip line on a PCB. The 100 /spl mu/m long, 5 /spl mu/m wide and 1 /spl mu/m thick CoNbZr thin-film probe could distinguish a meander line with a line pitch of 200 /spl mu/m. Maximum possible signal frequency range was estimated as over 1 GHz.