An orthogonal 6F/sup 2/ trench-sidewall vertical device cell for 4 Gb/16 Gb DRAM

This paper describes a novel 6F/sup 2/ trench-capacitor DRAM with a trench-sidewall vertical-channel array transistor. The cell features a line/space pattern for the active area, single-sided buried-strap node contact, vertical transistor channel formed along the upper region of the trench capacitor, a device active area bounded by the isolation trench and capacitor collar, and a single bit contact per cell.