High-power high-repetition-rate all-solid-state UV laser

Summary form only given. High-power all-solid-state UV lasers are used for precise material processing applications in industrial fields with the potential advantage the maintenance cost compared with other UV lasers. In solid-state lasers, although 266-nm UV power up to 10.6 W was obtained, the repetition rate was low as 100 Hz. in this paper we report the higher-power high-repetition-rate UV beam generation by CsLiB/sub 6/O/sub 10/ fourth harmonic generation of an all-solid-state laser.