Characterization of silicon electro-optical modulators for microwave photonic links

In this submission, we present the characterization of a silicon electro-optical modulator using Mach-Zehnder interferometer structure. We characterize the transmission spectra upon various DC and RF voltage supplies with different input optical power. We show the slope efficiency dependence on the optical input power. We also measured the spur-free dynamic range of the modulator using two-tone method, showing an optical power dependent SFDR with maximum value of ~ 7.5 dBc.