Characterization algorithm for segmented MEMS mirrors

Segmented MEMS mirrors have the potential to revolutionize optical designs for imaging and beam directing systems. Foveated imaging, adaptive optical zoom, and enhanced multi-spectral capability have already been demonstrated at Sandia National Laboratories using MEMS elements. The high stroke and individual segment control with piston and 2-directional tilt is very attractive for these and other applications. To address the challenge of characterizing segmented MEMS mirrors, a novel closed loop optimization algorithm has been developed to drive the mirrors to a desired shape utilizing feedback from a WYKO interferometer. This method has proved to produce more accurate results than previous attempts to drive the mirror with an open loop model.