Optimum Design and Vibration Suppression of a Piezoelectric Amplified Microactuator Using FEM Analysis

In this research the optimum design of a piezoelectric amplified microactuator has been achieved and sensitivity analysis in FEM simulation software. In addition, for the sake of simplicity and utilizing the FEM software simulation facilities, the control strategy has been embedded in FEM simulation as a programming routine. The simulations showed the efficiency of the proposed controller to suppress the microactuator's undesired vibrations.