Fabrication of ZnO micro-fluidic channels by ZnO sol-gel/PMMA bilayer structure

In this study, we describe simple fabrication methods to fabricate ZnO micro-fluidic channels by using a ZnO sol-gel/polymethymethacrylate (PMMA) bilayer structure. Two types of ZnO micro-fluidic channels were then created successfully after a hot-embossing step and the subsequent removal of PMMA by annealing.