Analysis of photo-elastic modulation in acceleration sensing

A novel accelerometer implemented as a MOEMS (micro-opto-electro-mechanical system) is proposed in the paper. The analysis of photo-elastic effect which is utilized for acceleration sensing is presented. The acceleration is introduced and sensed through a diaphragm structure waveguide on silicon substrate. By analyzing the deformation of the diaphragm, the stress and strain distribution in the diaphragm is calculated. Phase of the light is affected by the strain as well as its distribution in the diaphragm. By using the optical effect for acceleration sensing, the performance of the sensor is improved. Different light modes in waveguide are taken into account in the analysis.