Optical sensing based on simultaneous ellipsometry, reflectivity and spectrometry profiles in sub-micro-holes structures for bio-applications

Summary form only given. A dielectric micro-nano structure consisting of a triangular lattice of sub-micro-holes fabricated on a SiO
₂
/Si wafer produces spectra interference patterns as a function of the angle of incidence for both p and s polarization directions as well as a phase shift between s and p polarisation. The measurements have been performed using a commercial available ThermaWave Optiprobe 5220, which allows obtaining these data simultaneously by using a linearly polarized laser operating at 675 nm with a tightly focussed beam, which provides a sub-micrometer spot and therefore allow these measurements to be accomplished in a single sub-micro-hole. Consecutively the reflectivity of the photonic structures is measured and analyzed over a wide range of wavelengths of light as well.