24-28 GHz Gyrotron-based Sources for Technological Applications

A design of gyrotron-based systems and examples of their applications are presented. The field of application of the millimeter-wave (mm-wave) energy extends considerably in the last years. Several models of the 24 -28 GHz gyrotron-based systems ranging from 3 to 15 kW in continuous wave power have been recently developed by the Institute of Applied Physics. The design of these systems is presented. Examples of their use for materials processing, production of ion beams, and mm-wave plasma assisted chemical vapor deposition are given.