Experimental Investigation of Micro-fabricated Folded Waveguide Backward Wave Oscillator for Submillimeter Application

Successful two-step X-ray lithography (LIGA) process is demonstrated for the first time for the application to millimeter and submillimeter wave vacuum devices. The experiment of the two-step LIGA-fabricated folded waveguide BWO with a 12 kV electron gun using thermionic cathodes and cold cathodes using carbon nanotubes are being investigated at the frequency of 0.1 THz.