A Novel Ultrasonic Motor Using Orthogonal Bimorphs

The main purpose of this paper is to describe a novel ultrasonic motor which is suitable for small information devices. With a bending mode of a bimorph structure having relatively large displacement, the input voltage and frequency could be reduced. The overall shape of the motor is very simple, so it could be manufactured and miniaturized with ease. From the simulated results, such as mode and harmonic analysis, resonance mode, operating frequency, and displacement are determined. Finally, the experimental results are compared with the simulated