A novel miniaturized filter on micromachined multilayered substrates

Stepped impedance lowpass filters require large low to high impedance ratios to obtain high performance. Such high ratios results in filter having large step discontinuities and thereby introduce losses. Miniaturized filters on micromachined multilayered substrates are capable of addressing the above issues and realize optimal performance filters. In this paper a micromachined multilayered filter is designed on a multilayered substrate with silicon (/spl epsiv//sub r/=11.7) and silicon dioxide (/spl epsiv//sub r/=3.9) and simulated in ADS 2002C (Varadan et al., 2003) and HFSS 9.2.1 (Blondy et al., 1998). The filters show an insertion loss of less than ldB and a return loss of less than -30dB at the desired cutoff frequency.