Task-Reconfigurable System for MEMS Assembly

This paper presents a Task-reconfigurable system developed for efficient and reliable MEMS assembly. The system consists of a set of autonomous modules that can adapt their shape and function to various assembly tasks, including a distributed 6 DOF coarse positioning module, a distributed 5 DOF fine positioning module, grippers designed for different manipulation tasks with same mechanical interface, a multi-view imaging system, and control software. In order to achieve high precision and dexterity in microassembly, a hybrid vision-force control method is proposed. For easier reconfiguration, a semi-automated calibration method is applied to quick calibrating of the new reconfigurations. Analysis and 3 cases of microassembly are presented to demonstrate that this system has high reconfigurability and adaptability.