Nano-fabrication for Evanescent Light Enhancement by Surface Plasmon Polariton for GaP Head of Ultrahigh Density Optical Disk

Optical heads of the VCSEL array and microlens array play a key role in obtaining higher evanescent light from a very small aperture (30nm) for this optical disk system. One solution for improvement of the writing power is to develop a special nano-fabricated corrugated thin metallic film for higher throughput efficiency by surface plasmon polariton enhancement. A fine metal grating fabrication method to get evanescent light wave enhancement has been studied with a FDTD simulation result.