Micromachined free-space matrix switches with submillisecond switching time for large-scale optical crossconnect

Summary form only given. In this paper, the system performance of the free-space micromachined matrix switches (FS-MMS) with submillisecond switching time is reported. The schematic drawing and the working principle of the switch mirror are shown. The bottom of the mirror is pivoted on the substrate by micro-fabricated hinges, therefore it can be rotated out of the substrate freely.