LIGA-microtesting system with integrated strain gauges for force measurement

A microsystem is presented which is applied in bending experiments of cantilever microbeams to determine the Young's modulus of electroplated materials used in the LIGA-process. The microsystem is manufactured by the LIGA technology combined with a sacrificial layer technique and the sacrificial structure technique. The system consists of a pneumatically driven microactuator, an optical position sensor, and a unit for specimen fixing. Strain gauges are integrated in the force transmitting unit of the actuator-a movable piston-for direct measurement of the forces transmitted to the specimen. The actuator allows the transmission of forces of several 10 mN and displacements of 100 /spl mu/m and more. In this way, the first LIGA-made microsystem has been realized which combines a fluid driven microactuator with electrical and optical sensors for force and displacement measurement.