Parameterized layout synthesis, extraction, and SPICE simulation for MEMS

A suite of software tools which implements parameterized layout synthesis and SPICE simulation for surface-micromachined micro-electrical-mechanical systems (MEMS) is presented. These tools and techniques are demonstrated by using the design of a MEMS linear resonator as an example, and the various stages of this design are examined, including the generation of the circuit layout from performance specifications, the simulation of the devices, and the testing of actual fabricated resonators.