Frequency Dependence Measurements of Complex Permittivity for YSZ Crystal Plates by the Cut-off Circular Waveguide Method

Yttria-stabilized zirconia (YSZ) is expected to have several applications related to Si technology. However, there are few reports of complex permittivity for YSZ crystals in microwave and millimeter wave regions, although a YSZ crystal has a relative permittivity of about 27 in 1 MHz. In this paper, the frequency dependence of two kinds of Yttria-stabilized zirconia plates is evaluated by the cut-off circular waveguide method. The measured results validate the usefulness of the method for the crystal material with a high dielectric constant. Moreover, a relationship between the complex permittivity and the non-uniformness of the YSZ crystal structure is revealed.