Development of Multipoint Galvo-scan chromatic confocal surface microscopy for AOI

In the article, multipoint scanning is proposed to replace the traditional line-scanned strategy to maximize the scanning lateral resolution by using a microlens array with a micro-pinhole plate to focus the light into a multipoint structure. This optical design can outperform the current multipoint scanning achieved using DMD or LCoS as digitally tunable pinhole arrays. Meanwhile, lateral scanning using a two-axis Galvo-scan driving mechanism is proposed to achieve area field-of-view covering. In addition, a new spatial conversion mechanism using an optical fiber array is designed to convert the two-dimensional multipoint array into a linear spectrum array for maximization in image acquisition. Optical system simulation and tests effectively verified and tested the desired measurement specification. A new multipoint full-field Galvo-scan chromatic confocal microscope can be verified for its feasibility in achieving a 300-micrometer scanning range scanning for one-shot surface profilometry.