Research on Influence of DBR Resistance on Vertical Cavity Surface Emitting Laser

This paper studies a nitride vertical cavity surface emitting laser based on conductive oxide DBR and its fabrication method. The laser structure method includes laser A, laser B and laser C three structural forms. This scheme uses conductive oxide materials to fabricate Distributed Bragg reflectors not only have excellent electrical conductivity, but also can be used as laser electrodes at the same time. The application of these schemes makes the laser structure studied in this paper do not need to use a transparent current spreading layer and an intra-cavity contact electrode structure, thereby significantly simplifying the laser structure and fabrication process; the fabrication method of this scheme is compatible with standard semiconductor fabrication processes, and can To meet the needs of large-scale optoelectronic device fabrication and integration, it has broad application prospects.