RF MEMS Resonance Sensor for Measuring Microplastics Concentration

Recently, microplastics have become a big problem, but conventional particle analyzers that can detect microplastics require a lot of time and cost, so in this paper, in order to solve this issue, a low-cost RF sensor was designed to detect microplastics. The proposed MEMS sensor consists of a microfluidic structure and an LC resonator. First, it is a principle of collecting microplastics through a microfluidic structure and measuring the concentration of microplastics using an LC resonance structure. Through the structure, it was confirmed that the concentration of 0.001% unit could be detected, and a circuit that could identify not only the concentration but also the type of substance was proposed.