Linear Servo Robust Tracking Control Based on Zero Phase Error Tracking-Feed-Forward and Extended State Observer

In order to make the control accuracy of macro linear motor reach micron level, this paper presents a combined repetitive control strategy based on the combination of Zero Phase Error Tracking-Feed-Forward (ZPET-FF) controller and the Extended State Observer (ESO).ZPET-FF is feed forward controller, which use the real-time compensation of the controller was performed according to the tracking error of the system, so the influence of parametric variation of the system and the system’s dynamic tracking error could be reduced. While ESO reduces the influences of the uncertainties, suppresses the system noise and improves the anti-interference ability of the system effectively. The experiment shows that the proposed control method not only improves the dynamic tracking performance of the system, but also reduces the tracking error of the system.