Mass sensing using micromechanical resonators operating in nonlinear regime

The contribution deals with a numerical modelling and analysis of micro/nano-mechanical resonators operating in the non-linear regime which is intended to be utilized for an enhancement of the resonator sensing range eventually its sensitivity. Standardly the mass spectrometry is performed using the linearly operated resonators, which have however number of limitations. One of the main is a low accuracy of mass detection when particle is too heavy or light with respect to the resonator mass. An alternative way to this approach solving the mentioned drawback is presented here. The particle mass is characterized just from the change of the first resonant frequency and from the maximal vibrational amplitude in the resonators center upon crossing the resonant frequency. Attention is paid also to an analysis of the resonator´s mechanical reliability upon its operation.