Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 µm – 25 µm, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength.