High Performance Polarization Rotator-Splitter Based on Si3N4 Waveguide with Relaxed Fabrication Tolerance

A novel polarization rotator-splitter is presented based on Si
3
N
4
platform with relaxed fabrication-tolerance and high-performance. The proposed device is fabricated by standard-photolithography due to the introduced high-asymmetrical directional-coupler, and demonstrates a polarization extinction-ratio ~20dB with the fabrication-tolerance ~±1 50nm and polarization conversion-loss ~1.5dB across the C-band.