Focus-Induced Photoresponse in Amorphous Silicon Photodetectors for low-light and sub-mm resolution 3D Imaging Applications

We report the Focus-Induced Photoresponse (FIP) in amorphous silicon photodiodes as a key enabler for future high performance 3D imaging systems. The sensors achieve $\sim 540 \mu \mathrm{m}$ depth resolution at ~55 cm, 60 dB signal-to-noise ratio at 1.4 MHz modulation frequency and sensitivities below $0.036 \mu \mathrm{W}$/mm
²
.