Position tracking control of an ultra-precision servo system

Positioning accuracy are key performance indicators for high-end manufacturing equipment that conduct point-to-point motions. An analysis of a servo system is presented via the mathematical deduction, then the position accuracy of the system is defined. In order to improve the positioning accuracy, a control method based on Genetic Algorithm is proposed to deal with the dynamic disturbances and to reduce the control errors. The tracking errors of each axis has been predicted via feedforward empirical data by means of Genetic Algorithm. Then a high precision simulation has been executed on a servo system case. Experimental results shows that the proposed control method can achieve stable and accurate position tracking of the system with dynamic disturbances.