Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.