Analysis of the electrothermal coupling performance with buried power rail structure introduction

The introduction of the buried power rail (BPR) structure improves the area of standard cells and promotes the progress of technology nodes. However, the thermal effect caused by the BPR structure has not attracted widespread attention. The impact of BPR on electro-thermal coupled characteristics is investigated in this work. The results show that as the electrical setting is to connect the BPR structure at the source side, current performance is maximally improved along with a severe self-heating effect. However, from the perspective of the synergistic evaluation of electro-thermal coupling, it is suggested to adopt the form of source-end connection BPR to improve the performance at the device level.