Thermoelectromechanical coupling of MEMS graphene resonators

Graphene has excellent mechanical and electrical properties and is a candidate material for high-frequency resonators. The negative coefficient of thermal expansion (CTE) has an important influence on the damping factor in the thermal-piezoresistive resonators (TPR). This paper simulates the thermal stress of graphene resonators with various sizes and structures with temperature changes, as well as the resonance performance affected by thermal stress. Then, the temperature distribution of graphene resonators driven by different DC voltages is studied through electrothermal coupling. Compared with silicon resonators, it has radically opposite mechanical and resonant properties under the influence of thermal stress and exhibits better temperature uniformity and stability in electrothermal coupling.