Octagonal Planar Microtransformer for MEMS

The work presented in this paper concerns the modelling of an integrated octagonal planar microtransformer operating at high frequencies. The integrated microtransformer consists of two planar stacked spiral octagonal coils. Basing on Mohan’s method, the geometrical parameters are evaluated. The different parasitic effects created in the stacked layers are grouped perfectly in the equivalent electrical circuit. The thermal and electromagnetic effects generated in the microtransformer are illustrated, using finite elements method on COMSOL Multiphysics 5.3 software. The gap between the coils is considered as an integrated MIM capacitor created at high frequencies leads to create a microfilter with the secondary coil.