A CMOS Microelectrode Array Integrated into an Open, Continuously Perfused Microfluidic System

A monolithic device is presented that features a CMOS microelectrode array system integrated into an open microfluidic device. The system includes two microelectrode arrays, each featuring 1024 microelectrodes arrayed within a 1.6 × 1.6 mm
²
sensing area. It enables label-free in vitro impedance and electrophysiology recordings from cells and tissues. The open microfluidic system provides oxygenation and perfusion capabilities, as well as controllable liquid handling, which makes the device a versatile tool for long-term experiments and compound development studies.