Thermal Sensing Performances of Thin-Film Lateral PiN Diodes at 80 K and 300 K

The thermometric behavior of lateral 50-nm Silicon-On-Insulator PiN diodes are studied from ambient to liquid-nitrogen temperature. Prototypes were manufactured and their experimental performances are compared to theoretical models. Thanks to a temperature sensitivity reaching 25%/K and a low noise level at 80 K, a minimum thermal resolution of 0.1 mK is obtained. Such diodes represent an attractive solution for high performance thermal sensing in bolometric detectors.