High Precision Control System for the Nanomechanical Devices Based on Alloys with Shape Memory Effect

Recent progress in design of nanomechanical tools with shape memory effect (SME) resulted in successful realization of the new systems for 3D nanomanipulation and bottom-up nanointegration of the nanoobjects like CNT, nanowires etc. SME demands controlled heating of the active layer of the shape memory nanotool. The heating can lead to thermal drift and errors in positioning of the nanotool. The paper presents the experimental data on the thermal expansion of a new heating system which includes two tungsten needles, numerical modeling and experimental data on the thermal expansion of a heating system with the tungsten microneedle depending on the configuration of its tip geometry. It is proved that the control system for nanomechanical devices including the two microneedles and the microneedle with optimized profile demonstrates both improved precision of positioning (less than 50 nm) and smaller electric energy consumption.