Aerosol-Assisted plasma deposition of nanocomposite thin films

Aerosol injection is an appealing method for plasma thin film deposition. It enables to use liquids as well as dispersions independently on their characteristics. Here, nanocomposite thin films are formed by pulsed injection of a colloidal solution in low-pressure plasma. We discuss the effects of pulsed aerosol injection parameters on the balance of matter.