Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.