Dynamic Topography Measurement System Based on Optical Frequency Comb

Aiming at the problems of low measurement accuracy of structure and topography and difficult reconstruction of three-dimensional topography, a non-contact online measurement method based on optical frequency comb was proposed to measure the surface topography of structures. Firstly, the 3D mobile platform is used to drive the transceiver module to scan the surface of the microinstruction along the X, Y, and Z axes; the 3D point cloud data of the surface is obtained, and the surface topography features of the microinstruction are calculated and fitted. Combined with the algorithm, the data of the return light interference spectrum of the transceiver module is calculated and analyzed. The results show that the maximum detection area of the system can reach 900^x1100mm, the measurement repeatability can reach O.01mm, and the structure is simple and the detection speed is fast, which can fully meet the requirements of dynamic topographic feature detection.