Methodological Specifics of Nanoindentation of Nanosized Films

The paper investigates the surface morphology and methodological features of nanoindentation of gold and indium nanosized films using the micro-nano modifier “Micro-nano mod”. The influence of material surface roughness on the image and impression size after nanoindentation is shown. It was found that nanoindentation of indium nanofilms on glass requires an indentation load not exceeding 0.9 cN to correctly determine the impression size. It is demonstrated that during nanoindentation of gold nanofilms on a glass substrate, the shape of the Berkovich indenter impression is not triangular. It is determined that after nanoindentation, the gold nanoparticles are displaced and the impression disappears.