Development of a TES for Antenna-Coupled Bolometer for Cosmic Microwave Background Detection

In the most recent development in cosmic microwave detection, there is great interest for planar antenna coupled transition edge sensor (TES), which allows performance that meets the requirements of future cosmology mission. In particular, we are developing such kinds of bolometers with a planar sinuous antenna that are well suited for dense arrays for both imaging and polarization measurement, for cosmic mircowave background (CMB), earth observation, and security. In this article, we are selecting two different TES platform (Ti/Au and Ir/Au) options suitable for high-performance bolometer to be operated in space applications. We present here a preliminary bolometer design and first studies for the realization of Ti/Au and Ir/Au TESs, with particular regard to the dependence of the transition temperature
T
_c
on the thermal profile and oxygen contamination during the production or annealing process.