Recycling of wastewater generated from semiconductor processing factories

Recycling of HF wastewater from wafer process is essential to be a zero emission semiconductor factory. Silicon dioxide etchant is one of the most consumed HF chemical used during wafer process. It is often used as a cleaning solvent for cleaning of equipment parts. This article provides information on a new wastewater treatment system installed at Ricoh Electronic Devices Company's Yashiro factory. For the first time in the world, HF raw material is being recycled. Also presented will be wastewater treatment cost and performance data.