A high power ultrasonic linear motor with a longitudinal-bending hybrid transducer for high-speed and precise drive of a heavy stage

This paper presents a holding system for a longitudinal-bending hybrid transducer linear motor in order to achieve operational stability, and utilizes a PID feedback control system for precise positioning by the proposed ultrasonic linear motor. The holding system can hold the motor firmly, but does not affect the longitudinal and bending vibration modes. By using the new supporting system, the residual vibrations of the stage have been reduced by 20 times compared to that of previous results, and the settling time has been remarkably shortened. Incorporating the present motor into a PID feedback control system, it was possible to position the 10-kg-stage at speed of 200 mm/s with the accuracy of 50 nm.