Vibration Suppression Control for Pneumatic Vibration Isolation Table Using FF Control Input Based on Pressure Signal

The pneumatic vibration isolation table has the advantage of making it difficult for vibrations from the floor to be transmitted to the table, but it also has the disadvantage of making it difficult for the vibrations on the table to escape under the floor. Therefore, by actively moving the air in the air spring in and out, the vibration convergence of the table is promoted. However, since the on-off valve is used as an air valve, it does not return to the original position after the vibration converges, but converges leaving a steady-state deviation. Therefore, the purpose is to quickly converge the table and suppress the steady-state deviation to within 20 [µm] under the constraint of the discrete value input by the on-off valve. In order to achieve this purpose, this paper proposes a control method in which the input is applied in a feedforward way, focusing on the dimension of the air spring internal pressure value.