800 nm band MEMS-tunable VCSEL for microfabricated atomic clock

With aiming at realization of a tunable laser at 800 nm wavelength range for micro atomic clock applications, which can reduce the cost and accelerate the spread of micro atomic clocks. We fabricate an assembled tunable laser which consists of a half VCSEL chip and a MEMS mirror chip. The tuning range of 20 nm and the emission of the 795 nm laser required for the Rb atomic clock have been demonstrated at a tuning voltage below 20 V.