Issues and advances in rapid Quasi-Static CV for high throughput semiconductor process monitoring

A rapid Quasi-Static Capacitance-Voltage (QSCV) method has been advanced to extract simultaneous Cp and Rp values. Multi-segment voltage stimulus waveforms generate digitized currents from single or parallel DUTs. Resulting current vectors are resolved into Rparallel (Rp) and C parallel (Cp) components using vector analysis methods. We compare QSCV and LCR methods and discuss instrument and modeling issues.