Parasitic Coupling Effects in Coplanar Short Measurements

On-wafer measurements are indispensable for the characterization of electronic devices at millimeter-wave and terahertz frequencies. Recent investigations have demonstrated parasitic effects stemming e.g. from probes, multimode propagation and crosstalk using line standards as devices under test. However, for short-circuited coplanar structures which are often used as reflect standards in on-wafer calibrations, these parasitic effects have not been thoroughly investigated. Therefore, this paper presents a detailed study of parasitic mode effects in conjunction with probe influences occuring in coplanar short measurements.