Broadband THz Interconnect for Hybrid Integration of InP and Si Platforms

We demonstrate a broadband terahertz coupling between InP-based coplanar waveguide and silicon dielectric rod waveguide for hybrid integration. A coupling efficiency of around −2 dB has been experimentally achieved in frequency range between 70-120 GHz. Numerical simulations reveal an operational 3dB-bandwidth $\gt100$ GHz.