Microbolometer Pixel Based on Vertical CNT Membrane for Broadband Absorption at Room Temperature

A design for a unique microbolometer pixel based on a vertically aligned carbon nanotube (CNT) membrane is introduced for a broadband absorption range. The new platform technology was fabricated and characterized for the infrared (IR) region that shows a fast response >1000 Hz and a temperature coefficient of resistance (TCR) of about 0.28%/°C with a high thermal stability for applications at temperatures even beyond 200 °C. With a conservative calculation of the absorbed laser power, a responsivity of 1 mA/W was already achieved. The structure has the potential for a high integration density with a pitch dimension down to $2\times 2 ~\mu$m
²
.